FIBER-OPTIC VIBRATION SENSOR BASED ON FREQUENCY MO

专利名称：FIBER-OPTIC VIBRATION SENSOR BASED ON

FREQUENCY MODULATION OF LIGHT-EXCITED OSCILLATORS

发明人：ZOOK, J., David,HERB, William, R.,BURNS,

David, W.

申请号：EP00915830.4申请日：20000222公开号：EP1166128A1公开日：20020102

摘要：A sensor device for detecting vibration, including a light source for providing alaser light, a first optical fiber connected to the source for transmitting the laser light, anoscillator positioned to receive the transmitted laser light and adapted to reflect thelight as a frequency modulated light; a second optical fiber positioned to capture thefrequency modulated light to transmit the frequency modulated light; and a frequencymodulated discriminator for receiving the frequency modulated light from the secondoptical fiber and producing a signal responsive of vibration of the oscillator. In apreferred embodiment, the frequency modulated discriminator further includes afrequency meter for determining the average number of cycles per unit time to provide asecond signal responsive of the temperature of the oscillator. The optical fibers may be apair of different fibers positioned for transmitting the laser light and the frequencymodulated light respectively, or the same fiber positioned for transmitting both the laserlight and the frequency modulated light. In this latter embodiment, the device furtherincludes a beam splitter to direct the frequency modulated light to the discriminator. The

preferred oscillator includes a microchip having a microbeam mounted on a thin siliconcantilever such that deflection of the beam perpendicular to the plane of the microchipchanges the tension in the microbeam to change its resonant frequency. Also preferred isa microbeam including a thin metal deposit to create a bimorph structure.

申请人：Honeywell Inc.

地址：101 Columbia Road Morristown, New Jersey 07962 US

国籍：US

代理机构：Hucker, Charlotte Jane

更多信息请下载全文后查看