Testing of semiconductor integrated circuits

专利名称：Testing of semiconductor integrated circuits发明人：Shunichi Iida申请号：US08/691173申请日：19960801公开号：US05793219A公开日：19980811

摘要：A semiconductor integrated circuit is tested such that probe styli are broughtinto contact with electrodes on integrated circuit chips formed in a semiconductor waferto test circuit characteristics of the integrated circuit chips. A test is conducted over agiven number of integrated circuit chips. A fraction defective over the given number ofintegrated circuit chips is calculated as a result of the test conducted. Probe pressurewith which the probe styli contact the electrodes on the integrated circuit chips iscontrolled on the basis of the calculated fraction defective.

申请人：YAMAHA CORPORATION

代理机构：Pillsbury Madison & Sutro LLP

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