专利名称：APPARATUS AND METHOD FOR
INSPECTING AN OBJECT
发明人：Thomas ENGEL申请号：US13955020申请日：20130731
公开号：US20140043602A1公开日：20140213
专利附图：
摘要：An apparatus and method for optically inspecting an object, comprising anobject carrier for carrying the object, a pattern generating unit for illuminating the objectwith a measurement pattern, an image capture unit for capturing a number of images of
the object, imaging optics for influencing a light beam path between the object and theimage capture unit, and a data processing unit for determining at least one property ofthe object on the basis of the captured images. The apparatus can be set to at least afirst operating distance and a second operating distance, and furthermore has a diffusingunit, which can be changed between an active state, in which the diffusing unit influencesthe light beam path in front of the pattern generating unit and an inactive state, in whichthe diffusing unit does not influence the light beam path in front of the patterngenerating unit.
申请人：Carl Zeiss Industrielle Messtechnik GmbH
地址：Oberkochen DE
国籍：DE
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